Plasma roughening of polished SiC substrates
نویسندگان
چکیده
منابع مشابه
Growth of Sic Substrates
In recent years SIC has metamorphisized from an R&D based materials system to emerge as a key substrate technology for a significant fraction of the world production of green, blue and ultraviolet LEDs. Emerging markets for S i c homoepitaxy include high-power switching devices and microwave devices. Applications for heteroepitaxial GaN-based structures on S i c substrates include laserss and m...
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ژورنال
عنوان ژورنال: Materials Science in Semiconductor Processing
سال: 2002
ISSN: 1369-8001
DOI: 10.1016/s1369-8001(02)00115-4